Conference Archive
Applications of Plasmas: Micro to Nano Scale
| Date: | Mon, 18 February 2008 |
|---|---|
| Venue: | Institute of Physics, London, UK |
| Organised by: | Ion and Plasma Surface Interactions Group (IPSI) |
Introduction
First Announcement
This is a meeting addressing the requirements on plasmas, in the etch and deposition of material, applicable to devices/ systems at the micro scale and in the transition to nano scale. The devices/ systems may be used, for example, in semiconductor, automotive, aeronautical, communications, photonics, medical or related industries.
All issues of importance to the use of plasmas or ion beams within the fields of micro and nano technology, fall within the scope of the meeting, including plasma modelling and diagnostic techniques, material processing, processing equipment and control systems. Relevant disciplines are Physics, Electrical and Electronic Engineering and Chemistry, as well as Medicine, Biology, Mathematics and Computing.
The meeting will include both invited and contributed presentations and is aimed to be relevant and useful to users of plasma technology from industry, experienced research workers and students and others looking to increase their participation in the fields of micro and nano technology.
Provisional Programme (Changes may be necessary)
09.30 – 10.00 | Registration and refreshments |
10.30 – 11.20 | Consideration for Plasma Tools to Achieve Nanoscale Resolution (Invited) |
11:20 – 11.40 | ALD - adapted CVD |
11.40 – 12.00 | Formation of Titania Nano-Structures by Physical Vapour Deposition V.Vishnyakov, P. Kelly, N. Mahdjoub, J.Colligon, N.Allen (Manchester Metropolitan University) |
12.00 – 12.50 | Application of Low Temperature Plasma for Advanced Microelectronics (Invited) |
12.50 – 14.00 | Lunch inc. Poster and Exhibitor Session |
14.00 – 14.50 | High Performance Nanocrystalline Silicon Transistors Deposited by Radio Frequency Plasma-Enhanced Chemical Vapour Deposition (Invited) |
14.50 – 15.10 | Dynamically Generated Chemical Models with Applications to O2 1-Delta Production and Silicon Etching with SF6 |
15.10 – 15.30 | Operation of an RF-Driven Micro-Discharge Source |
15.30 – 16.00 | Afternoon refreshments inc. Poster and Exhibitor Session |
16.00 – 16.20 | Challenges of Etching NEMS: The Transition from Micro to Nano |
16.20 – 16.40 | Plasma Coating of Alternative Metal Alloys Used in Surgery |
16.40 – 17.00 | Surface nano-process by a single, slow highly charged ion impact |
Poster Presentations
Electrical and Optical Characteristics of a Silicon Micro-Cavity Discharge Array
P. M. Bryant, G. C. B. Clarke and J. W. Bradley, University of Liverpool
Application of Microwave-Induced Plasmas to the Synthesis and Bulk Modification of Solid State Compounds
R. Douthwaite, University of York
Diamond-Like Carbon Based Environmently-Friendly Coatings for Aircraft Landing Gear
S. Podgoric1,2, R. Bulpett2, B.J. Jones2, J. Franks3, J. Rumble1
1Hawker Pacific Aerospace, 2BrunelUniversity, 3Diameter Ltd
Fees
The registration fee includes attendance at all lectures, refreshments, lunch, conference literature.
Online Registration Fees:-
| Fees up to and including | Fees from |
Member | £73.00 | £93.00 |
Student Member | £25.00 | £45.00 |
Non Member | £96.00 | £116.00 |
Hardcopy Registration Fees:-
| Fees up to and including | Fees from |
Member | £83.00 | £103.00 |
Student Member | £35.00 | £55.00 |
Non Member | £106.00 | £126.00 |
See below for online and hardcopy registration
Membership Information
Members of the Institute of Physics
- All members of the Institute of Physics including those with an application pending
- Staff at Institute Affiliated Plus Schools
- Members of co-sponsoring Institutes and Societies
- Members of other Societies which have a Companion Society or collaboration agreement with the Institute of Physics
Concessionary
The Concessionary rate is available to student and retired members of the Institute of Physics and those on a career break or a low income.
Non Members
Non members can now join the Institute of Physics for a 3 month period and during this time take advantage of membership benefits including attending conferences at the reduced members rate. For further information and to join, please see http://www.iop.org or contact membership@iop.org.
Membership of the Institute of Physics is open to all those with an interest in Physics. For further information, please visit http://members.iop.org or e-mail membership@iop.org
Registration
Register on-line and receive a £10 discount off your registration fee. On-line registrations is available only to those paying by debit or credit card. All payments will be processed securely using WorldPay and confirmation of your payment will be sent by e-mail once the transaction is complete.
For those unable to register on-line, you can download the PDF Registration Form* and return together with a remittance for fees to the Registrations Department, The Institute of Physics, 76 Portland Place, London W1B 1NT, UK or by fax to +44 (0)20 7470 4900. Please note that unless payment is received prior to the conference, your booking will not be guaranteed - please see alternative payment methods.
*Please be aware that the fees for student/concessionary member and non member on the PDF form are the wrong way round. The correct fees are those above - please specify, with a note on the form, which fee you should be paying.
Confirmation of Booking
On-line - Confirmation of your booking will appear on the screen prior to entering payment details. Please print this page for your records. Confirmation will follow via mail within five days of registering.
Registration via hard copy - Confirmation of your booking will be sent within ten days of registering. If payment is not enclosed with your registration form, you will receive a pro-forma invoice which must be paid prior to the conference.
If you do not receive written confirmation within the dates specified above, please e-mail registrations@iop.org
Value Added Tax
Charges shown in this document are exempt from VAT unless otherwise indicated. Where VAT is applicable it is shown and calculated at the current standard rate of 17.5%. If the rate is altered as a result of government legislation charges may be adjusted accordingly. A tax invoice/receipt will be issued to those indicating that this is required on the registration form. The Institute's VAT registration number is 461-6000-84.
Cancellations
Registrants who cancel their booking before the cancellation deadline of 12 February 2008 will receive a full refund minus a 20% administrative charge. All cancellations must be in writing (please note that organisers cannot accept any cancellation made over the telephone, unless it is accompanied by a cancellation of the booking in writing). No refund can be made to those notifying cancellation from 13 February 2008.
Organisers:
Dr. Leslie M. Lea
Surface Technology Systems plc
Imperial Park
Newport
NP10 8UJ
U.K.
Tel: +44(0) 1633 652455 (direct)
Fax: +44(0) 1633 652405
E-mail: leslie.lea@stsystems.co.uk
Dr. Alec Goodyear
The Open University
Department of Materials Engineering
Walton Hall
Milton Keynes
MK7 6AA
U.K.
Tel: +44(0) 1908 653386
Fax: +44(0) 1908 653858
E-mail: a.goodyear@open.ac.uk
Conference Co-ordinator:
Lisa Cornwell
The Institute of Physics
76 Portland Place
London W1B 1NT
Tel: +44 (0)20 7470 4800
Fax: +44 (0)20 7470 4916
E-mail: lisa.cornwell@iop.org
^ To the top ^